JPH0543093Y2 - - Google Patents
Info
- Publication number
- JPH0543093Y2 JPH0543093Y2 JP18578587U JP18578587U JPH0543093Y2 JP H0543093 Y2 JPH0543093 Y2 JP H0543093Y2 JP 18578587 U JP18578587 U JP 18578587U JP 18578587 U JP18578587 U JP 18578587U JP H0543093 Y2 JPH0543093 Y2 JP H0543093Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum
- mounting shaft
- cylinder
- cylinder part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009434 installation Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 16
- 238000001704 evaporation Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 9
- 238000007738 vacuum evaporation Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18578587U JPH0543093Y2 (en]) | 1987-12-05 | 1987-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18578587U JPH0543093Y2 (en]) | 1987-12-05 | 1987-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189956U JPH0189956U (en]) | 1989-06-13 |
| JPH0543093Y2 true JPH0543093Y2 (en]) | 1993-10-29 |
Family
ID=31477051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18578587U Expired - Lifetime JPH0543093Y2 (en]) | 1987-12-05 | 1987-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0543093Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2920442B2 (ja) * | 1992-03-17 | 1999-07-19 | 株式会社日立製作所 | ロードロック式真空処理装置 |
-
1987
- 1987-12-05 JP JP18578587U patent/JPH0543093Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0189956U (en]) | 1989-06-13 |
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